Auto switches operate at ordinary temperatures only (5 to 60☌). Uses 2 auto switches to detect the "opening and closing" positions and 1 auto switch to detect one of either the "open" or "closing" position.
(Applying excessive torque can result in damaged components or abnormal noises.) To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. However, rotation of the adjustment nut can be fixed to prevent operation errors. Note: The adjustment nut does not rotate during valve operation. Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them. Closing of the initial and main exhaust valves When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully. Opening of the main exhaust valve (valve M) When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount. Opening of the initial exhaust valve (valve S) (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. Initial exhaust valve opening adjustmentĪdjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part. Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog. The initial exhaust valve conductance is the "viscous flow" value. Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)Įxternal: hard anodized aluminum, Internal: base materialĠ.4 to 0.7 (both main and initial exhaust valves)
#Xld mp3 256 series
XLD Series operating port direction ModelĪlways closed (spring return and seal) (both main and initial exhaust valves)ĥ to 60 (5 to 150 for high temperature type)įor standard material (FKM): 1.3 × 10 -10, values at normal temperature and excluding gas permeationįor standard material (FKM): 1.3 × 10 -11, values at normal temperature and excluding gas permeation
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